Product features
Supporting multiple versions (PLC/PC) and various mainstream communication protocols;
Design and production performed in accordance with SEMI safety production standard;
High channel design capacity, UPH400~550pcs;
Suitable for multiple product dimensions and magazines;
MFC wafer level patented design, preventing gas leakage from causing safety accidents (supporting high-risk gases such as hydrogen);
Patented design of high sealing chamber, up to 5pa;
Water contact angle<10° (related to the material of product surface);
Design of four channels for simultaneous processing of 4 products, with dual bottom electrodes, reducing the time for board entry and exit, significantly improving efficiency, and ensuring product uniformity in processing.
technical specifications
|
Functional Configuration |
Technical Parameters |
|
|
L×W×H(mm) |
L1600×W1150×H1700 |
|
|
Equipment |
Net weight(kg) |
1000 |
|
Peripheral clearance(mm) |
600 at the back,600 on both sides |
|
|
Chamber |
Volume(L) |
About 9 |
|
Channel(nos.) |
4 |
|
|
Bottom electrode(pcs.) |
2(transition function) |
|
|
Feeding mode |
Magazine |
|
|
Adaptive product dimension(mm) |
Width:40-100 Length:150-300 |
|
|
Electrode |
Electrode dimension(mm) |
528×300 |
|
RF power supply |
Standard power(kW) |
1 |
|
Frequency(MHZ) |
13.56 |
|
|
Gas control |
Up to three channels |
2 channels(standard),3 channels(optional) |
|
Control system |
Human-machine interface |
PC+touch screen |
|
Remote interface |
Communication |
Optional |
|
Vacuum pump |
Optional dry pump |
17CFM |
|
Optional oil pump |
195CFM |
|
|
Optional dry pump with purging function |
YES |
|
|
Nitrogen purging flow rate (SLM) |
2 |
|
|
Vacuuming time(S) |
10月15日 |
|
|
Vacuum breaking time(S) |
3-4 |
|
|
Factory facilities |
Power supply |
Three-phase 380V50/60Hz 4.5kW(oil pump) |
|
Dimension & type of process |
1/4inch Swagelok |
|
|
Purity of process gas |
Industrial grade and above |
|
|
Pressure of process gas(psig) |
10-20 |
|
|
Dimension &type of purging gas pipeline |
1/4inch Swagelok |
|
|
Purging gas purity |
Industrial grade and above |
|
|
Pressure of purging gas(psig) |
15 |
|
|
Dimension &type of pneumatic |
10mm push-in fitting |
|
|
Purity of pneumatic gas |
Compressed air,oil-free,dew point≤7℃,particles<5 |
|
|
Pressure of pneumatic gas(psig) |
70-90 |
|
|
Compressed air(mm) |
∅8 |
|
|
Compliance |
Certification |
SEMI |
|
Ancillary equipment |
Nitrogen generator(optional) |
Optional for nitrogen purging |
|
Water cooler(optional) |
Optional for electrodes cooling |
|
|
Hydrogen kit(optional) |
Optional for hydrogen treatment |
|
|
Exhaust gas processor(optional) |
Optional for fluorine exhaust treatment |
|
|
Transportation |
Total weight(kg) |
1050 |
|
Number of packages |
1 |
|
|
Packaging in line with SPM15 standard |
YES |
|
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