Product features
1. Stainless steel of the vacuum chamber;
2. Ultra low temperature - The temperature is as low as 40 ℃;
3. Omnidirectional surface cleaning - Different plasma can enter the ultra-fine slit for cleaning;
4. Environmental protection - No harmful substances are produced before and after treatment, and keep away from the harmful solvents to human body;
5. Stability - Continuity and constancy to maintain the stability of machinery and equipment during operation;
6. Cleaning - Remove dust and oil, fine cleaning and static electricity;
7. Excitation - Improve the adhesion ability of the surface and greatly increase the surface energy of the object;
8. Platy stripping - AF / AS layer platy stripping.
technical specifications
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Function configuration |
Technical parameter |
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Model |
VP-60L |
VP-80L |
VP-100L |
VP-150L |
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Dimensions (mm) |
L=1200; W=920; H=1690 |
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Vacuum chamber dimensions (mm) |
L=403; W=400;H=403 |
L=450; W=400;H=450 |
L=470; W=460;H=470 |
L=500; W=600;H=500 |
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Vacuum chamber material |
Stainless steel |
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Electrode plate dimensions (mm) |
319(L)×374(W) |
320(L)×420(W) |
380(L)×440(W) |
520(L)×470(W) |
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Electrode plate material |
Special aluminum electrode |
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Weight(kg) |
560 |
580 |
630 |
680 |
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Control |
PLC+ Touch screen |
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Electrode plate structure |
Horizontal 8 layers |
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Vacuum pump system |
Two-stage rotary plate vacuum pump/ Roots vaccum pump |
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Vacuum measurement system |
Pilani resistance vacuum gauge |
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Gas measuring system |
High precision mass flowmeter |
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Plasma generator |
High precision 0-500W plasma generator |
High precision 0-1000W plasma generator |
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Plasma matching unit |
High precision 0-500W automatic matching unit |
High precision 0-1000W automatic matching unit |
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Working vacuum |
10-100 Pa |
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Limit pressure of vacuum pump |
5×10-1 Pa |
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Time to achieve vacuum time(s) |
≤ 55 |
≤ 70 |
≤ 80 |
≤ 100 |
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Time to release vacuum time(s) |
≤ 15 |
≤ 20 |
≤ 25 |
≤ 30 |
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Gas control range (sccm) |
Mass flow 0-300 (optional) |
Mass flow 0-500 (optional) |
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Radio frequency power supply (w) |
0-500 (Adjustable in range) |
0-1000(Adjustable in range) |
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Mode of operation |
Manual, one key automatic operation |
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Power supply |
Three phase 380V |
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Rated power (kw) |
4 |
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